Hesse Mechatronics

Lasersonic Wire Bonder Bondjet LSB959

Lasersonic Wire Bonder LSB959 – Fully Automatic Heavy Wire Bonder with Thermosonic Function

The Heavy Wire Bonder LSB959 is a wire bonder of the latest generation with the capability of adding thermal energy to the welding process. The laser applied for the heating of the bond tool enables a precise temperature control at the tip of the bond tool. Therefore, this platform offers the first possibility of a termosonic-heavy wire-process.
Beneficial effects of heated bondtool for the process:

  • Increased weldability:
    Especially for materials and processes which are challenging by “cold” ultrasonic bonding
  • Only local heating:
    Least influence on the periphery
  • Reduced ultrasonic power and normal force:
    Less power and/or less force reduces mechanical stress and avoid damage of sensitive substrates (e.g. dies)
  • Increased total system capacity:
    processing of heavy wire without increasing space or cross section
  • Improved yield
  • Increased shear forces
  • Reduced process time
  • Precisely controlled process

Lasersonic Wire Bonder LSB959 processes fully automatic a wide range of large-sized substrates, chips and other materials. The systems can be used as a fully automatic machine or operated manually. Outstanding features are high speed and the large bonding area. In addition to a standard configuration, Hesse offers automation concepts individually adapted for every application.

  • Full integration of tool temperature in the process parameters and bonding programms

All features of a Heavy Wire Bonder BJ959 with same footprint

  • Improved wire guidance: short distance between bondhead and spool
  • Optimized pattern recognition
  • Automated bondtool change without wedge gauge
  • Precisely programmable bondforce actuator
  • Loop generator for individual loops
  • Maintenance-free solid state joints
  • Pre-setting of bondheads via EEPROM
  • Hesse Assist Tools (option):
    • E-Box: visualization solution for optimized tool change and programmable alignment marks for cutter, wire guide and bond wedge
    • Automated bondforce calibration; a load cell prevents operator error and ensures robust processes
    • Innovative bondtool detection
    • Wire spool detection

Flexibility

  • Flexible use of the large working area, e.g. vacuum clamping of several
    5″ x 7″ standard DCBs by vacuum workholder sixfold
  • Maximization of throughput by automation (two/more parallel lanes
  • Safe operation: Laser class 1
  • Two processes on one plattform: classic ultrasonic heavy wire
    bonding and thermosonic heavy wire bonding

Quality

  • Continuous real time monitoring of wire deformation, transducer current, and frequency, bond tool temperature within programmable control limits
  • Process integrated Quality Control (PiQC): detection of further parameters, e.g. friction behavior, by additional sensor system for 100 % quality monitoring in real time (patented); as option
  • Integrated, non-destructive pulltest
  • Remote pull function on PiQC threshold value for optimized cycle time; > 99% savings in quality check compared with single NDPT (non destructive pull test)

Thermosonic Heavy Wire Bondhead

  • Heavy wire bondhead with thermosonic function
  • LSK (Backcut): Laser-heated bondtool tip with controlled laser
    absorption
  • Temperature: Bondtool tip at 400-500 °C for interface at 150-200 °C
  • Frequency: 60 kHz*; alternative frequencies on request
  • Cutting methods: active, passive
  • Fast local heat transport into wire and substrate
  • No thermal effects on transducer
  • Accurate laser setting due to pilot laser
  • Inert gas noozle (e.g. nitrogen) prevents Cu oxidation during bonding process (option)
  • Precisely controlled bondtool temperature
  • Intelligent bondhead connecting system with integrated memory stores all calibration data and enables bondhead replacement in minutes
  • Wire clamp for loop shape control is standard on all bondheads; optionally equipped with non destructive pulltest

Wire

  • Cu: 300 μm – 500 μm**

Laser

  • IR fiber laser with power up to 130W
  • Programmable temperature output

Loop form functions

  • Reproducible loop geometry by wire guide appropriate for the material involved and moving wire buffer
  • Constant wire length and loop height
  • Mechanically demanding loop geometrics by parameterization and individual wire clamp application
  • Individual loop shapes by configurable loop trajectory generator

Working area

Bonder X Y Z
LSB959 370 mm 560 mm 42 mm

P-rotation: 440°

Footprint and weight

Bonder W x D x H [mm] Weight
BJ959 805 x 1634 x 1912 ca. 1300 kg
excl. attached parts like e.g. status lamp, control panel etc

Media connectivity

  • Power supply 230V AC
  • Gigabit-Ethernet (TCP/IP)
  • USB-Ports
  • HDMI
  • Compressed air (CDA clean, dry air)
  • Vacuum
  • Process gas

* exact range of frequencies on request
** other sizes on request

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